Microoptics

Micro-optical components and systems are used in information- and telecommunication technologies, optical storage devices, measuring and analytical instruments. Typical components are fiber couplers/connectors, waveguides, lenses, slits, gratings, and mirrors which can be fabricated in silicon, glass, or polymers.
Protron Mikrotechnik uses silicon wet chemical and deep reactive ion etching (DRIE) for the fabrication of micro-optical components. These technologies allow the fabrication of high precision parts combined with a high design flexibility.

Reference Projects

• fiber arrays with alignment structures
• standard fiber arrays
• v-grooves, u-grooves
• vacuum fiber grippers

• high-precison slits
• pinholes
• gratings

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