Micromechanical Sensors

Protron develops customized micromechanical sensors. Besides our pressure sensor which can be adopted to your needs, we offer a development service for all kind of sensors. We have design and manufacturing know-how for inertial sensors (gyroscopes, inclinometers, accelartion sensors), thermal sensors (thermocouples and thermopiles), fluidic sensors (flow sensors for gases and fluids, interdigitated elelctrodes for impedance analysis).

Information about our new thermal flow sensor: Protron Flow Sensor

Pressure Sensors

Protron has developed an absolute pressure sensor system which is based on an ultra small surface micromachined capacitive sensor element. The special choice of fused silica as a nonconducting substrate material results in the elimination of all parasitic capacitances to the substrate. Due to the capacitive principle the sensor has a long term high accuracy and a very small hysteresis compared to piezoresistive pressure sensors.

Features

  • pressure ranges: 0.3-1.3 bar / 2-8 bar
  • resolution: up to 0.01mbar @ 1bar
  • die size 0.6x1.2 mm², height 0.48 mm
  • package size 5x5mm², height 1.2mm
  • I²C digital output
  • supply voltage 1.8 to 5.5V
  • low power consumption
  • very small hysteresis
Our data sheet is now available:
Protron Pressure Sensor