Besides our activities in RF-MEMS, microfluidics, and microoptics, Protron provides it's technology know-how for the realization of other devices, e.g. sensors and actuators. Some application examples are listed below. Please don't hesitate to contact us. Our engineers have experience in many MEMS application fields.

Reference Projects

• electrostatic actuators
• acceleration sensors
• membrane sensors
• interdigitated electrodes
• silicon molds for replication techniques

Protron Mikrotechnik offers

• system design
• prototyping
• production - from small to high volume

Sensor on silicon nitride membrane

Interdigitated gold electrodes on glass