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MEMS RF switches are miniaturized mechanical devices for
switching high frequency electromagnetic signals.
The advantages of MEMS RF switches compared to PIN diodes
and field-effect transitors (FETs) are minimum insertion loss, maximum
isolation, a superior signal linearity, and a very low power consumption.
Protron Mikrotechnik develops electrostatic RF switches
which are suitable for an application in
- mobile communication systems
- RF test equipment
- radar systems
- satellites
Protron's RF switches are actuated by electrostatic silicon
comb drives with a high actuation force which results in a good reliability.
The switch concept can be adapted to frequencies from DC to about 12GHz
in series or shunt implementation. A hermetic zero-level packaging avoids
contamination of the contact area. The switch is designed as a discrete
chip suitable for flip-chip or wire bonding.
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MEMS RF switches with metallic waveguides
Electrostatic actuator for an RF MEMS switch
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